Senior/Principal Process Engineer Silicon Epitaxy (Si-Si Epi)

Job Summary

We are seeking a highly motivated Silicon Epitaxy Process Engineer responsible for the development, optimization, qualification, and sustaining of Si-Si epitaxial growth processes on 300mm wafers. The engineer will support ASM and/or Applied Materials epitaxy reactors and work closely with Integration, Device, Yield, Equipment, and Manufacturing teams to deliver robust epitaxial processes meeting quality, cost, cycle time, and yield targets.

Key Responsibilities:

Process Development & Optimization

• Develop and optimize silicon epitaxial growth processes for CMOS, BCD, Power, Analog, and HV technologies.
• Establish recipes for:
• Non-selective Si epitaxy
• In-situ doped epitaxy (Boron, Phosphorus, Arsenic)
• Thick and thin epi layers
• High-voltage and power device epi requirements
• Optimize critical parameters including:
• Growth rate
• Thickness uniformity
• Doping concentration and uniformity
• Defectivity
• Crystal quality
• Surface roughness
• Haze and morphology
• Evaluate process windows and define control plans.

Ownerships

• Own and sustain ASM Intrepid and/or AMAT Centura Epi platforms.
• Drive equipment matching and chamber-to-chamber consistency.
• Lead process qualifications following preventive maintenance, hardware changes, and chamber rebuilds.
• Work with Equipment Engineering to improve:
• Uptime
• MTBF
• Throughput
• Process capability

Yield & Defect Reduction

• Investigate excursions using SPC and data analytics.
• Drive reduction of:
• Stacking faults
• Slip lines
• Crystal defects
• Autodoping
• Transition widths
• Contamination issues
• Perform root cause analysis and implement corrective actions.

Process Characterization

• Analyze and interpret metrology data from:
• SIMS
• CV Profiling
• XRD
• TEM
• SEM
• AFM
• Optical Inspection
• FTIR
• Four Point Probe
• Correlate material characteristics with electrical and device performance.

Technology Transfer & Production Support

• Support NPI and technology ramp activities.
• Transfer epitaxy processes from development to manufacturing.
• Generate process specifications, FDC limits, OCAPs, and control plans.
• Provide manufacturing support for yield and output improvement initiatives.

Cross-Functional Collaboration

• Partner with:
• Device Engineering
• Process Integration
• Manufacturing
• Yield Engineering
• Quality
• Equipment Engineering
• EHS
• Coordinate with suppliers and OEMs for process and hardware improvements.

Required Qualifications

Education

• B.Tech/ M.Tech / Ph.D. in:
• Materials Science
• Electrical Engineering
• Chemical Engineering
• Physics
• Semiconductor Engineering

Experience

• 4+ years of semiconductor process engineering experience.
• 3+ years of hands-on experience in Silicon Epitaxy.
• Experience with ASM and/or Applied Materials Epi tools is highly preferred.

Technical Skills:

Epitaxy Process Knowledge

• Silicon homoepitaxy fundamentals
• Gas chemistry:
• DCS (Dichlorosilane)
• TCS (Trichlorosilane)
• Silane
• HCl chemistry
• In-situ doping:
• B₂H₆
• PH₃
• AsH₃
• Auto-doping control
• Defect engineering

Equipment Knowledge

• ASM Epsilon Series
• ASM Intrepid
• AMAT Centura RP Epi
• AMAT Epi Systems
• Knowledge of reactor hardware, gas delivery, wafer handling, and thermal systems.

Data Analysis

• JMP
• Spotfire
• Python
• Minitab
• SPC/FDC systems
• DOE methodology
• Statistical analysis and process capability evaluation