RCF Slurry Piping Design (Semiconductor)

Job Description – Slurry Systems Design Manager

Project: Semiconductor Manufacturing Facility

Department: Engineering / Design

Position: Slurry Systems Design Manager

Experience: Minimum 10 years of relevant experience

Reporting To: Engineering Manager / Project Engineering Head

• Job Purpose
  
  

To lead slurry systems design and engineering for semiconductor manufacturing facilities, with particular focus on Chemical Mechanical Planarization (CMP) slurry storage, preparation, distribution, recirculation, and point-of-use delivery systems. The role is responsible for engineering design, hydraulic analysis, equipment selection, technical reviews, vendor coordination, multidisciplinary interfaces, and delivery of safe, reliable, and contamination-controlled slurry systems in accordance with project specifications and schedules.

• Key Responsibilities
• Slurry Systems Design
• Lead the design and engineering of slurry storage, preparation, transfer, distribution, and recirculation systems for semiconductor fabrication facilities.
• Develop design criteria and system configurations based on CMP tool requirements, slurry characteristics, consumption rates, and operating conditions.
• Review and develop Process Flow Diagrams (PFDs), Piping and Instrumentation Diagrams (P&IDs), equipment layouts, and piping arrangements.
• Design slurry supply and return headers, recirculation loops, distribution units, and point-of-use connections.
• Coordinate slurry flow rates, pressure, temperature, consumption, and interface requirements with CMP equipment suppliers.
• Ensure appropriate provisions for system capacity, operational reliability, maintainability, and future expansion.
• Hydraulic Analysis and Equipment Sizing
• Perform and review hydraulic calculations, flow distribution analysis, pressure drop calculations, and pump sizing.
• Use hydraulic analysis software such as PIPE-FLO Professional, AFT Fathom, or equivalent tools for slurry network analysis, where appropriate.
• Select and size slurry pumps, storage tanks, mixing tanks, filters, and associated equipment.
• Evaluate slurry viscosity, density, solids concentration, particle-size distribution, and settling characteristics when establishing design parameters.
• Review pump operating points and system resistance to ensure stable delivery to CMP tools.
• Assess the need for flushing, recirculation, mixing, and draining based on slurry supplier and process tool requirements.
• Piping and Material Selection
• Select suitable piping materials, valves, fittings, pumps, tanks, seals, and wetted components based on slurry compatibility, cleanliness, and project specifications.
• Evaluate PFA, PTFE, PVDF, PP, and other approved materials for the intended slurry application.
• Review piping layouts for hydraulic performance, drainability, accessibility, maintainability, and minimization of dead legs.
• Ensure appropriate provisions for flushing, cleaning, drainage, and maintenance.
• Coordinate equipment connections, piping interfaces, and installation requirements with CMP tools and slurry package vendors.
• Slurry Quality and Contamination Control
• Establish design requirements for maintaining slurry quality from storage to point of use.
• Evaluate risks associated with sedimentation, particle agglomeration, contamination, and slurry degradation.
• Review requirements for agitation, mixing, recirculation, filtration, and particle control based on slurry supplier recommendations.
• Coordinate flow, pressure, differential pressure, and other instrumentation requirements.
• Ensure system design supports reliable slurry delivery and minimizes contamination risks and unplanned interruptions.
• Engineering Deliverables and Technical Reviews
• Prepare, review, and approve engineering deliverables within delegated authority, including:
• Design basis and system design criteria.
• PFDs and P&IDs.
• Hydraulic calculations and pump sizing reports.
• Equipment datasheets and technical specifications.
• Line lists, valve lists, and instrument lists.
• Equipment layouts and piping drawings.
• BOQs, MTOs, and procurement specifications.
• Ensure technical consistency across drawings, calculations, specifications, and vendor documentation.
• Review design comments and ensure timely closure of technical issues.
• Maintain engineering document revisions and submission schedules.
• Vendor and Procurement Coordination
• Coordinate with CMP tool suppliers, slurry system package vendors, pump manufacturers, tank manufacturers, and filtration equipment suppliers.
• Review vendor proposals, drawings, datasheets, and technical submittals.
• Perform technical bid evaluations and resolve technical deviations and clarifications.
• Verify compliance with project specifications, process requirements, and equipment interface requirements.
• Coordinate vendor document approvals with procurement and project schedules.
• Identify design gaps and technical risks before purchase order release.
• Software and Digital Engineering
• Use PIPE-FLO Professional, AFT Fathom, or equivalent for hydraulic analysis, as applicable.
• Use AutoCAD for reviewing P&IDs, piping layouts, and engineering drawings.
• Use Navisworks Manage for 3D model reviews, clash detection, and constructability coordination.
• Review models using Revit, Plant 3D, AVEVA E3D, or Smart 3D, depending on the project platform.
• Use Microsoft Excel for engineering calculations, data analysis, and equipment sizing.
• Use Bluebeam Revu or equivalent tools for drawing markups and technical document reviews.
• Validate software inputs, assumptions, and results against design criteria and vendor data.
• Multidisciplinary Coordination
• Coordinate with process, piping, electrical, instrumentation, HVAC, civil, structural, and wastewater engineering teams.
• Resolve equipment layout constraints, piping routing conflicts, utility interfaces, and maintenance access requirements.
• Participate in design reviews and 3D model coordination meetings.
• Coordinate slurry waste collection and interfaces with wastewater treatment systems.
• Provide engineering support for technical queries, installation, commissioning, and troubleshooting.
• Safety, Quality, and Compliance
• Ensure compliance with project specifications, applicable codes, and relevant semiconductor facility requirements.
• Participate in HAZID, HAZOP, and process risk assessments.
• Coordinate requirements for leak detection, containment, safe handling, and maintenance access, where applicable.
• Implement design checking and quality assurance procedures.
• Identify and mitigate risks related to process performance, contamination, constructability, and system reliability.
• Engineering Team and Schedule Management
• Plan engineering deliverables, design review milestones, and resource requirements.
• Allocate tasks and coordinate the work of slurry design engineers and designers.
• Monitor deliverable quality, progress, and compliance with project schedules.
• Coordinate design priorities with procurement, construction, and commissioning teams.
• Resolve technical issues and escalate critical constraints to project leadership.
• Qualifications and Experience
• Bachelor's degree in Chemical Engineering, Mechanical Engineering, or a relevant engineering discipline.
• Minimum 10 years of relevant engineering experience in slurry systems, process utilities, piping design, or semiconductor facility engineering.
• Experience in semiconductor fabrication facilities is strongly preferred.
• Practical experience in CMP slurry supply, storage, distribution, recirculation, and point-of-use delivery is desirable.
• Experience in hydraulic analysis, equipment sizing, vendor coordination, and detailed engineering is required.
• Technical Competencies
• Strong understanding of slurry system design, PFDs, P&IDs, hydraulic calculations, and pump selection.
• Knowledge of slurry properties, particle handling, sedimentation, contamination control, and filtration.
• Experience with pumps, storage tanks, mixing systems, filters, valves, piping, and instrumentation.
• Understanding of high-purity and chemical-resistant piping materials.
• Ability to review hydraulic models, interpret calculation results, and validate design assumptions.
• Strong technical documentation and interdisciplinary coordination skills.
• Key Performance Indicators
• Timely completion and approval of engineering deliverables.
• Compliance with CMP tool and slurry supplier requirements.
• Timely closure of design review comments and technical queries.
• Reduction of design clashes, engineering rework, and site-related design issues.
• Technical compliance of vendor packages and procurement documents.
• Achievement of agreed design quality, reliability, and contamination-control requirements.
• Key Competencies
• Technical leadership and engineering decision-making.
• Strong analytical and troubleshooting skills.
• Design planning and multidisciplinary coordination.
• Vendor management and technical evaluation.
• Quality assurance, risk management, and schedule control.
  

Effective communication and engineering team coordination.